Fully Relaxed, Crack-Free AlGaN with upto 50% Al Composition Grown on Porous GaN Pseudo-Substrate
Fully relaxed, crack free, smooth Al<sub>x</sub>Ga<sub>1−x</sub>N layers with up to 50% Al composition were demonstrated on pseudo-substrates composed of dense arrays of 10 × 10 µm<sup>2</sup> compliant porous GaN-on-porous-GaN tiles. The AlGaN layers were grown in steps for a total of 1.3 µm. The g...
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| Autores principales: | , , , , , , |
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| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
MDPI AG
2022-07-01
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| Colección: | Crystals |
| Materias: | |
| Acceso en línea: | https://www.mdpi.com/2073-4352/12/7/989 |
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