Design Approach for Reducing Cross-Axis Sensitivity in a Single-Drive Multi-Axis MEMS Gyroscope

In this paper, a new design technique is presented to estimate and reduce the cross-axis sensitivity (CAS) in a single-drive multi-axis microelectromechanical systems (MEMS) gyroscope. A simplified single-drive multi-axis MEMS gyroscope, based on a mode-split approach, was analyzed for cross-axis se...

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Autori principali:	Hussamud Din, Faisal Iqbal, Byeungleul Lee
Natura:	Artigo
Lingua:	Inglês
Pubblicazione:	MDPI AG 2021-07-01
Serie:	Micromachines
Soggetti:	microelectromechanical systems (MEMS) single-drive multi-axis gyroscope cross-axis sensitivity finite element analysis (FEA) model
Accesso online:	https://www.mdpi.com/2072-666X/12/8/902
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