Microstructure of electronic-grade polycrystalline silicon core-matrix interface
This paper focuses on the problems encountered in the production process of electronic-grade polycrystalline silicon. It points out that the characterization of electronic-grade polycrystalline silicon is mainly concentrated at the macroscopic scale, with relatively less research at the mesoscopic a...
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| Principais autores: | , , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
World Scientific Publishing
2024-06-01
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| coleção: | Journal of Advanced Dielectrics |
| Assuntos: | |
| Acesso em linha: | https://www.worldscientific.com/doi/10.1142/S2010135X24400058 |
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