UV-LIGA Microfabrication for 1.1 THz Staggered Double-Grating Slow-Wave Structures
In this paper, a 1.1 THz staggered double-grating slow-wave structure (SWS) for traveling wave tubes (TWTs) is fabricated using UV-LIGA processes based on RD-2150 photoresist. The designed SWS has a wide side of 170 μm and a narrow side of 50 μm, and when half of the SWS is fabricated, the height of...
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| Principais autores: | , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI AG
2026-03-01
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| coleção: | Micromachines |
| Assuntos: | |
| Acesso em linha: | https://www.mdpi.com/2072-666X/17/4/427 |
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