Design and Fabrication of Silicon-Blazed Gratings for Near-Infrared Scanning Grating Micromirror

Blazed gratings are the critical dispersion elements in spectral analysis instruments, whose performance depends on structural parameters and topography of the grating groove. In this paper, high diffraction efficiency silicon-blazed grating working at 800–2500 nm has been designed and fabricated. B...

ver descrição completa

Detalhes bibliográficos

Principais autores:	Sinong Zha, Dongling Li, Quan Wen, Ying Zhou, Haomiao Zhang
Formato:	Artigo
Idioma:	Inglês
Publicado em:	MDPI AG 2022-06-01
Colecção:	Micromachines
Assuntos:	silicon-blazed grating platform and fillet anisotropic wet etching oxidation sharpening diffraction efficiency
Acesso em linha:	https://www.mdpi.com/2072-666X/13/7/1000
Tags:	Adicionar Tag Sem tags, seja o primeiro a adicionar uma tag!