High repetition rate deposition of boron nitride films using femtosecond pulsed laser
Cubic (c-BN), and hexagonal (h-BN) boron nitride thin films are of interest in many applications and industries because of their unique mechanical, thermal and chemical properties. In this work, we investigate high repetition rate deposition of BN films using femtosecond pulsed laser deposition. Bor...
Збережено в:
| Автори: | , |
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| Формат: | Artigo |
| Мова: | Inglês |
| Опубліковано: |
IOP Publishing
2020-01-01
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| Серія: | Materials Research Express |
| Предмети: | |
| Онлайн доступ: | https://doi.org/10.1088/2053-1591/abb39a |
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