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Athermal Tantalum Pentoxide Mach-Zehnder Interferometers Based on Structural Compensation Method

We demonstrate Mach-Zehnder interferometer-based (MZI) athermal photonic devices using the structural compensation method. Unlike previous structural compensation studies that were applied on the thermal sensitive materials such as silicon, this work is implemented in tantalum pentoxide (Ta<sub>2</s...

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Autors principals: Mingjian You, Zhenyu Liu, Weiren Cheng, Xingyu Tang, Ning Ding, Zhengqi Li, Min Wang, Li Shen, Qiancheng Zhao
Format: Artigo
Idioma:Inglês
Publicat: IEEE 2025-01-01
Col·lecció:IEEE Photonics Journal
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Accés en línia:https://ieeexplore.ieee.org/document/10854680/
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