Three-phase ScAlN-based PMUT-driven acoustic streaming micropump
Abstract Scandium-doped aluminum nitride (ScAlN)-based piezoelectric micromachined ultrasonic transducer (PMUT) arrays have attracted increasing attention in acoustofluidics for micro total analysis systems (μTAS), particularly for applications involving acoustic radiation force for bioparticle mani...
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| Principais autores: | , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
Nature Publishing Group
2026-05-01
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| Series: | Microsystems & Nanoengineering |
| Acceso en liña: | https://doi.org/10.1038/s41378-026-01339-5 |
| Tags: |
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