Fabrication of highly homogeneous and controllable nanogratings on silicon via chemical etching-assisted femtosecond laser modification

Femtosecond laser direct writing is widely exploited in surface periodic structures processing. However, this technique still faces challenges in obtaining high surface homogeneity and flexible morphology controllability. In this study, a flexible and efficient approach has been proposed to fabricat...

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Detalles Bibliográficos

Principais autores:	Huang Ji, Jiang Lan, Li Xiaowei, Wang Andong, Wang Zhi, Wang Qingsong, Hu Jie, Qu Liangti, Cui Tianhong, Lu Yongfeng
Formato:	Artigo
Idioma:	Inglês
Publicado:	Wiley 2019-05-01
Series:	Nanophotonics
Assuntos:	femtosecond laser chemical etching nanograting structures highly homogeneous highly controllable
Acceso en liña:	https://doi.org/10.1515/nanoph-2019-0056
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