TiNiHf/SiO2/Si shape memory film composites for bi-directional micro actuation

ABSTRACTThe martensitic phase transformation in Ti40.4Ni48Hf11.6 shape memory alloys is leveraged for bi-directional actuation with TiNiHf/SiO2/Si composites. The shape memory properties of magnetron sputtered Ti40.4Ni48Hf11.6 films annealed at 635°C – 5 min are influenced by film thickness and the...

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Autors principals:	Sabrina M. Curtis, Marian Sielenkämper, Gowtham Arivanandhan, Duygu Dengiz, Zixiong Li, Justin Jetter, Lisa Hanke, Lars Bumke, Eckhard Quandt, Stephan Wulfinghoff, Manfred Kohl
Format:	Artigo
Idioma:	Inglês
Publicat:	Taylor & Francis Group 2022-04-01
Col·lecció:	International Journal of Smart and Nano Materials
Matèries:	Bimorph microactuator NiTiHf bistable actuator shape memory alloy thin films
Accés en línia:	https://www.tandfonline.com/doi/10.1080/19475411.2022.2071352
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