Hybrid electrostatic–piezo MEMS photonic integrated modulators
Programmable photonic integrated circuits (PICs) have recently emerged as an important technology for quantum information science and artificial neural networks. In particular, PICs with microelectromechanical-based modulators have the advantages of voltage-based control, ultra-low-energy consumptio...
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| Principais autores: | , , , , , , , |
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| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
AIP Publishing LLC
2026-03-01
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| Serier: | APL Photonics |
| Online adgang: | https://pubs.aip.org/aip/app/article-pdf/doi/10.1063/5.0316551/20932533/031301_1_5.0316551.pdf |
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