A Five-Hole Pressure Probe Based on Integrated MEMS Fiber-Optic Fabry-Perot Sensors
The five-hole pressure probe based on Micro-Electro-Mechanical Systems (MEMS) technology is designed to meet the needs of engine inlet pressure measurement. The probe, including a pressure-sensitive detection unit and a five-hole probe encapsulation structure, combines the advantages of a five-hole...
Gorde:
| Egile Nagusiak: | , , , , , |
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| Formatua: | Artigo |
| Hizkuntza: | Inglês |
| Argitaratua: |
MDPI AG
2024-04-01
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| Saila: | Micromachines |
| Gaiak: | |
| Sarrera elektronikoa: | https://www.mdpi.com/2072-666X/15/4/554 |
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