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Etching-assisted femtosecond laser modification of hard materials

With high hardness, high thermal and chemical stability and excellent optical performance, hard materials exhibit great potential applications in various fields, especially in harsh conditions. Femtosecond laser ablation has the capability to fabricate three-dimensional micro/nanostructures in hard...

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Hoofdauteurs: Liu Xue-Qing, Bai Ben-Feng, Chen Qi-Dai, Sun Hong-Bo
Formaat: Artigo
Taal:Inglês
Gepubliceerd in: Editorial Office of Opto-Electronic Journals Group, Institute of Optics and Electronics, CAS, China 2019-09-01
Reeks:Opto-Electronic Advances
Onderwerpen:
femtosecond laser
hard materials
wet etching
dry etching
Online toegang:http://www.oejournal.org/article/doi/10.29026/oea.2019.190021
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