Lightweight Thermal Compensation Technique for MEMS Capacitive Accelerometer Oriented to Quasi-Static Measurements
The application of MEMS capacitive accelerometers is limited by its thermal dependence, and each accelerometer must be individually calibrated to improve its performance. In this work, a light calibration method based on theoretical studies is proposed to obtain two characteristic parameters of the...
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| Hlavní autoři: | , , |
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| Médium: | Artigo |
| Jazyk: | Inglês |
| Vydáno: |
MDPI AG
2021-04-01
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| Edice: | Sensors |
| Témata: | |
| On-line přístup: | https://www.mdpi.com/1424-8220/21/9/3117 |
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