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Impact of Various Thermistors on the Properties of Resistive Microbolometers Fabricated by CMOS Process

Microbolometers based on the CMOS process has the important advantage of being automatically merged with circuits in the fabrication of larger arrays, but they typically suffer from low detectivity due to the difficulty in realizing high-sensitivity thermistors in the CMOS process. In this paper, tw...

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Autores principales: Yaozu Guo, Haolan Ma, Jiang Lan, Yiming Liao, Xiaoli Ji
Formato: Artigo
Lenguaje:Inglês
Publicado: MDPI AG 2022-10-01
Colección:Micromachines
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Acceso en línea:https://www.mdpi.com/2072-666X/13/11/1869
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