The Effect of Power on Inductively Coupled Plasma Parameters
In this work, we studied the effect of power variation on inductively coupled plasma parameters using numerical simulation. Different values were used for input power (750 W-1500 W), gas temperature 300K, gas pressure (0.02torr), 5 tourns of the copper coil and the plasma was produced a...
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| Principais autores: | , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
University of Baghdad
2022-09-01
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| coleção: | Iraqi Journal of Physics |
| Assuntos: | |
| Acesso em linha: | https://ijp.uobaghdad.edu.iq/index.php/physics/article/view/1017 |
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