Research on the Application of Microcast Electromagnetic Coil in an Si MEMS Bistable Recoverable Safety and Arming Device
A low-driving energy and bistable recoverable MEMS safety and arming device (S&A), based on microcasting technology and deep silicon etching technology, is proposed to meet safety system requirements. A force–electromagnetic combination solution is constructed for the Si MEMS S&A, with parameters an...
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| Główni autorzy: | , , , , , , |
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| Format: | Artigo |
| Język: | Inglês |
| Wydane: |
MDPI AG
2023-06-01
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| Seria: | Micromachines |
| Hasła przedmiotowe: | |
| Dostęp online: | https://www.mdpi.com/2072-666X/14/7/1346 |
| Etykiety: |
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