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Study and Characterization of Silicon Nitride Optical Waveguide Coupling with a Quartz Tuning Fork for the Development of Integrated Sensing Platforms

This work demonstrates an ultra-compact optical gas-sensing system, consisting of a pigtailed laser diode emitting at 1392.5 nm for water vapor (H<sub>2</sub>O) detection, a silicon nitride (Si<sub>3</sub>N<sub>4</sub>) optical waveguide to guide the laser light, and a custom-designed, low-frequency...

Ausführliche Beschreibung

Gespeichert in:
Hauptverfasser: Luigi Melchiorre, Ajmal Thottoli, Artem S. Vorobev, Giansergio Menduni, Angelo Sampaolo, Giovanni Magno, Liam O’Faolain, Vincenzo Spagnolo
Format: Artigo
Sprache:Inglês
Veröffentlicht: MDPI AG 2025-06-01
Schriftenreihe:Sensors
Schlagworte:
LITES
optical gas sensing
photonic integration
piezoelectric resonator
QEPAS
quartz tuning fork
Online-Zugang:https://www.mdpi.com/1424-8220/25/12/3663
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