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Design and Fabrication of Silicon Nanowire based Sensor

This paper reports the process development of silicon nanowires sensor requires both the fabrication of nanoscale diameter wires and standard integration to CMOS process. By using silicon-on-insulator (SOI) wafer as a starting material, the nanowires is fabricated using a top-down approach which inv...

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Principais autores: Siti Fatimah Abd Rahman, Nor Azah Yusof, Uda Hashim, M. Nuzaihan Md Nor
Format: Artigo
Sprog:Inglês
Udgivet: Elsevier 2013-09-01
Serier:International Journal of Electrochemical Science
Fag:
electron beam lithography
silicon nanowire
resistivity
ph detection
Online adgang:http://www.sciencedirect.com/science/article/pii/S1452398123131610
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