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Application of Taguchi Grey Analysis to Optimization of Mechanical Properties of ZrWN/buffer Multilayer Coatings

Zirconium tungsten nitride (ZrWN) films are deposited onto SUS 304 stainless steel and glass, with and without a tungsten (W) and tungsten nitride (WN) buffer layer, by means of direct current (DC) reactive magnetron sputtering. This study determines the optimal parameter settings for the multilayer...

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Principais autores: Yong-Chang Zhao, Ding-Yeng Chen, Ding-Chiang Hu, Jian-Rong Li, Chun-Yao Hsu
Format: Artigo
Sprog:Inglês
Udgivet: Elsevier 2019-05-01
Serier:International Journal of Electrochemical Science
Fag:
buffer layer
sputtering
Taguchi grey
mechanical properties
Online adgang:http://www.sciencedirect.com/science/article/pii/S1452398123012087
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