Surface Functionalization of SU-8 Vertical Waveguide for Biomedical Sensing: Bacteria Diagnosis
In this paper, we present an SU-8 based evanescent waveguide with a vertical structure as a biomedical sensor. The waveguide is designed vertically to generate evanescent waves on both left and right surfaces for sensing. It is fabricated by E-beam lithography with only one-step process which has th...
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| Principais autores: | , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI AG
2018-11-01
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| coleção: | Proceedings |
| Assuntos: | |
| Acesso em linha: | https://www.mdpi.com/2504-3900/2/13/1081 |
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