PHOTOLITHOGRAPHY OF FILM STRUCTURES XEROGEL/POROUS ANODIC ALUMINA PREPARED IN VARIOUS ELECTROLYTES

The results of study the morphology of the microstructured porous anodic alumina films formed using electrochemical anodization, sol-gel synthesis, photolithography and chemical etching are given. The metal mask was not used in photolithography, because of fabrication the continuous xerogel film. Th...

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Detalhes bibliográficos

Principais autores:	L. S. Khoroshko, A. M. Asharif, T. I. Orekhovskaya, M. V. Meledina, V. A. Sokol, B. S. Kolosnitsin, N. V. Gaponenko
Formato:	Artigo
Idioma:	Russo
Publicado em:	Educational institution «Belarusian State University of Informatics and Radioelectronics» 2019-06-01
coleção:	Доклады Белорусского государственного университета информатики и радиоэлектроники
Assuntos:	пористый анодный оксид алюминия золь-гель фотолитография
Acesso em linha:	https://doklady.bsuir.by/jour/article/view/314
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