A Study on High Speed Control Mechanism of Micro-Depth Using PZT Actuator
The goal of this study is to develop a fast, controllable PZT-driven depth adjustment device with a flexure hinge. The device can be used to trace rapidly a flat or curved surface with several hundreds of micrometers’ variance in height. The lever type flexure hinge designed for a magnification rati...
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| Principais autores: | , , |
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| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
Korean Society for Precision Engineering
2018-01-01
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| Serier: | 한국정밀공학회지 |
| Fag: | |
| Online adgang: | http://jkspe.or.kr/upload/pdf/NODE07289244.pdf |
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