Demonstration of an As2S3-on-LiNbO3 Grating Coupler and its Application of Measuring a Grating-based Filter
We demonstrate the design, fabrication, and measurement results for an As<sub>2</sub>S<sub>3</sub> grating coupler on a LiNbO<sub>3</sub> substrate. The proposed coupler was fabricated by a single lithography step followed by a single reactive ion etching step, which substantially reduces the proces...
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| Автори: | , |
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| Формат: | Artigo |
| Мова: | Inglês |
| Опубліковано: |
IEEE
2016-01-01
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| Серія: | IEEE Photonics Journal |
| Предмети: | |
| Онлайн доступ: | https://ieeexplore.ieee.org/document/7762076/ |
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