Deeper Insight into the Mechanisms Behind Sputter Damage in Silicon Solar Cells Based on the Example of Nanocrystalline Silicon Carbide

Abstract Transparent conducting oxides, like indium tin oxide, enable lateral charge carrier transport in silicon heterojunction solar cells. However, their deposition can damage the passivation quality in the solar cell. This damage during the sputter deposition is a complex issue that has not been...

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Bibliografiske detaljer

Principais autores:	Alexander Eberst, Binbin Xu, Karsten Bittkau, Weiyuan Duan, Andreas Lambertz, Ansgar Meise, Marc Heggen, Rafal E. Dunin‐Borkowski, Uwe Rau, Kaining Ding
Format:	Artigo
Sprog:	Inglês
Udgivet:	Wiley-VCH 2024-09-01
Serier:	Advanced Physics Research
Fag:	amorphous silicons silicon carbides silicon heterojunctions sputter damage transparent passivating contacts
Online adgang:	https://doi.org/10.1002/apxr.202400036
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