MEMS Micromirror Actuation Techniques: A Comprehensive Review of Trends, Innovations, and Future Prospects

Micromirrors have recently emerged as an essential component in optical scanning technology, attracting considerable attention from researchers. Their compact size and versatile capabilities, such as light steering, modulation, and switching, are leading them as potential alternatives to traditional...

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Detalhes bibliográficos

Principais autores:	Mansoor Ahmad, Mohamed Bahri, Mohamad Sawan
Formato:	Artigo
Idioma:	Inglês
Publicado em:	MDPI AG 2024-09-01
Colecção:	Micromachines
Assuntos:	MEMSs MEMSs mirrors microactuators microelectromechanical systems micromirrors optical scanning
Acesso em linha:	https://www.mdpi.com/2072-666X/15/10/1233
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