Caracterización estructural mediante elipsometría espectral de multicapas basadas en SiO<sub>2</sub>
We have characterised PECVD-grown non-stoichiometric silicon oxides (SiOx) and thick waveguide structures based on these materials with spectroscopic ellipsometry. We have developed a fit method that allows detailed analysis of complicated ellipsometric spectra, such as those of thick (~10 μm) multi...
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| Hauptverfasser: | , |
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
Elsevier
2000-12-01
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| Schriftenreihe: | Boletín de la Sociedad Española de Cerámica y Vidrio |
| Schlagworte: | |
| Online-Zugang: | http://ceramicayvidrio.revistas.csic.es/index.php/ceramicayvidrio/article/view/773/801 |
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