Development of a solution spraying system for the synthesis of thin-film structures by the spray-pyrolysis method
Background. At the present stage of science and technology, one of the leading directions is the development of technological processes for the manufacture of nano- and microelectronic devices. Thin-film structures, on which most modern electronic components are based, are a promising area for th...
Guardat en:
| Autors principals: | , , , , , |
|---|---|
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
Penza State University Publishing House
2022-03-01
|
| Col·lecció: | Известия высших учебных заведений. Поволжский регион:Технические науки |
| Matèries: | |
| Etiquetes: |
Sense etiquetes, Sigues el primer a etiquetar aquest registre!
|