Model-based Hysteresis and Cross-coupling Compensation for Precision Control of Piezoelectric Fast Steering Mirror
This paper presents model-based hysteresis and cross-coupling compensators designed for precise control of a piezoelectric fast steering mirror (FSM). The hysteresis compensators are developed by inversely modeling the variation in the force constant relative to various excitation voltages, enabling...
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| Principais autores: | , , , , , , , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Korean Society for Precision Engineering
2026-02-01
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| Colecção: | 한국정밀공학회지 |
| Assuntos: | |
| Acesso em linha: | http://www.jkspe.or.kr/upload/pdf/JKSPE-025-091.pdf |
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