Evaluation of Crystalline Volume Fraction of Laser-Annealed Polysilicon Thin Films Using Raman Spectroscopy and Spectroscopic Ellipsometry
We investigated the crystallinities of poly silicon (poly Si) annealed via green laser annealing (GLA) with a 532-nm pulsed laser and blue laser annealing (BLA) with 450-nm continuous-wave lasers. Three-dimensional heat transfer simulations were performed to obtain the temperature distributions in a...
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| Autori principali: | , , |
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| Natura: | Artigo |
| Lingua: | Inglês |
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MDPI AG
2021-08-01
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| Serie: | Micromachines |
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| Accesso online: | https://www.mdpi.com/2072-666X/12/8/999 |
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