Dispersion Engineering of Waveguide Microresonators by the Design of Atomic Layer Deposition
In this work, we demonstrate dispersion engineering of silicon nitride waveguide resonators with atomic layer deposition (ALD). We conducted theoretical and experimental analyses on the waveguide dispersion with air cladding, hafnium oxide (HfO<sub>2</sub>) cladding, and aluminum oxide (Al<sub>2</su...
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| Hauptverfasser: | , , |
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
MDPI AG
2023-04-01
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| Schriftenreihe: | Photonics |
| Schlagworte: | |
| Online-Zugang: | https://www.mdpi.com/2304-6732/10/4/428 |
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