Electrophysical and thermoelectric properties and crystal structure of the formed Mn4Si7 thin vacuum coatings
The necessary information on the formation of high manganese silicide (Mn4Si7) coating by magnetron sputtering method is presented in this work. The technology and basic modes of creating the necessary targets for a magnetron sputtering device are presented. Targets were created by adding silicon an...
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| Principais autores: | , , , , , |
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| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
Elsevier
2024-12-01
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| Serier: | Optical Materials: X |
| Fag: | |
| Online adgang: | http://www.sciencedirect.com/science/article/pii/S2590147824000652 |
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