Capacitance–Voltage Studies on Electrostatically Actuated MEMS Micromirror Arrays

This article presents the electrostatic actuation performance of micromirror arrays for intelligent active daylight control and energy management in green buildings using a capacitive–voltage (C-V) measurement technique. In order to understand how geometric hinge parameters, initial opening angles,...

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Bibliografiska uppgifter

Huvudupphov:	Jiahao Chen, Xiaohui Yang, Mustaqim Siddi Que Iskhandar, Md. Kamrul Hasan, Shilby Baby, Muhammad Hasnain Qasim, Dennis Löber, Shujie Liu, Roland Donatiello, Steffen Liebermann, Guilin Xu, Hartmut Hillmer
Materialtyp:	Artigo
Språk:	Inglês
Utgiven:	MDPI AG 2025-01-01
Serie:	Micromachines
Ämnen:	electrostatic actuation MEMS micromirror arrays capacitance–voltage (C-V) measurement hinge structure initial tilt angle pull-in voltage
Länkar:	https://www.mdpi.com/2072-666X/16/2/157
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