Recent Advances in Metal-Oxide-Based Photoresists for EUV Lithography
Extreme ultraviolet lithography (EUVL) is a leading technology in semiconductor manufacturing, enabling the creation of high-resolution patterns essential for advanced microelectronics. This review highlights recent progress in inorganic metal-oxide-based photoresists, with a focus on their applicat...
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| Hauptverfasser: | , , , , |
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
MDPI AG
2024-08-01
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| Schriftenreihe: | Micromachines |
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| Online-Zugang: | https://www.mdpi.com/2072-666X/15/9/1122 |
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