Mechanism of Origin and Neutralization of Residual Triboelectricity at Scanning of Dielectric Surfaces by a Silicon Probe of the Atomic-force Microscope
The reasons and mechanism of the destructive effect of the electrostatic interaction forces of silicon probe and dielectric surfaces are established in the paper at the investigation of the surface microgeometry and mechanical characteristics by the atomic-force microscopy method. Calculation of the...
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| Auteurs principaux: | , , , |
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| Format: | Artigo |
| Langue: | Inglês |
| Publié: |
Sumy State University
2014-06-01
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| Collection: | Журнал нано- та електронної фізики |
| Sujets: | |
| Accès en ligne: | http://jnep.sumdu.edu.ua/download/numbers/2014/2/articles/jnep_2014_V6_02018.pdf |
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