Thermal Stability and Tribological Performance of DLC-Si–O Films
The thermal stability and tribological performance of silicon- and oxygen-incorporated diamond-like carbon films were investigated. The DLC-Si-O films were deposited using plasma-based ion implantation (PBII) method. The deposited...
Guardat en:
| Autors principals: | , , |
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| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
Wiley
2011-01-01
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| Col·lecció: | Advances in Materials Science and Engineering |
| Accés en línia: | http://dx.doi.org/10.1155/2011/483437 |
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