<i>In-Situ</i> Imaging of a Light-Induced Modification Process in Organo-Silica Films via Time-Domain Brillouin Scattering

We applied time-domain Brillouin scattering (TDBS) for the characterization of porogen-based organosilicate glass (OGS) films deposited by spin-on-glass technology and cured under different conditions. Although the chemical composition and porosity measured by Fourier-transform infrared (FTIR) spect...

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Autori principali:	Sathyan Sandeep, Alexey S. Vishnevskiy, Samuel Raetz, Sergej Naumov, Dmitry S. Seregin, Artem Husiev, Konstantin A. Vorotilov, Vitalyi E. Gusev, Mikhail R. Baklanov
Natura:	Artigo
Lingua:	Inglês
Pubblicazione:	MDPI AG 2022-05-01
Serie:	Nanomaterials
Soggetti:	time-domain Brillouin scattering two-photon absorption low-k curing mechanical properties
Accesso online:	https://www.mdpi.com/2079-4991/12/9/1600
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