Enhancement of the Homogeneity of Micro Slits Prepared by Wire Electrochemical Micromachining
Wire electrochemical micromachining (WEMM)is promising in the fabrication of metal micro parts or devices because it has many advantages in machining structures with high aspect ratios. The smaller machining gap in WEMM is particularly interesting because higher accuracy can be obtained. However, wi...
Gardado en:
| Principais autores: | , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
Elsevier
2013-11-01
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| Series: | International Journal of Electrochemical Science |
| Assuntos: | |
| Acceso en liña: | http://www.sciencedirect.com/science/article/pii/S1452398123132536 |
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