An Optical MEMS Acoustic Sensor Based on Grating Interferometer
Acoustic detection is of great significance because of its wide applications. This paper reports a Micro-Electro-Mechanical System (MEMS) acoustic sensor based on grating interferometer. In the MEMS structure, a diaphragm and a micro-grating made up the interference cavity. A short-cavity structure...
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| Principais autores: | , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI AG
2019-03-01
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| coleção: | Sensors |
| Assuntos: | |
| Acesso em linha: | https://www.mdpi.com/1424-8220/19/7/1503 |
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