Linnik interferometers for local spectroscopy in the UV, visible and near infrared wavelengths

Interference microscopy is a powerful optical metrology technique for surface topography and depth characterization of opaque, transparent and semi-transparent materials. This work presents the development of white-light interference microscopes optimized for multimodal measurements, encompassing sp...

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Detalles Bibliográficos

Principais autores:	Farid Mahfoud, Sebastien Marbach, Noémie Gambaudo, Rémy Claveau, Jesse Schiffler, Olivier Felix, Matthias Pauly, Paul Montgomery, Manuel Flury
Formato:	Artigo
Idioma:	Inglês
Publicado:	IOP Publishing 2026-01-01
Series:	JPhys Photonics
Assuntos:	interferometric microscopy multimodal measurements white-light interferometry Linnik configuration local spectroscopy UV-visible spectrum
Acceso en liña:	https://doi.org/10.1088/2515-7647/ae5581
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