Development of Fixture Element for Vacuum Transportation of Silicon Wafer Using Electro-Rheological Gel
Semiconductor process technology increasingly requires high accuracy and efficiency. In the case of processing thin fragile substrate such as silicon wafer, it has to be fixed with low strain. In addition, its fixture device can be used under vacuum condition because some processes are carried out i...
I tiakina i:
| Ngā kaituhi matua: | , , , , |
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| Hōputu: | Artigo |
| Reo: | Inglês |
| I whakaputaina: |
The Japan Society of Mechanical Engineers
2008-08-01
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| Rangatū: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Ngā marau: | |
| Urunga tuihono: | https://www.jstage.jst.go.jp/article/jamdsm/2/4/2_4_762/_pdf/-char/en |
| Ngā Tūtohu: |
Kāore He Tūtohu, Me noho koe te mea tuatahi ki te tūtohu i tēnei pūkete!
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