Fabrication of parabolic Si nanostructures by nanosphere lithography and its application for solar cells

Abstract We demonstrated fabrication of a parabola shaped Si nanostructures of various periods by combined approach of nanosphere lithography and a single step CF4/O2 reactive ion etch (RIE) process. Silica nanosphere monolayers in a hexagonal array were well deposited by a solvent controlled spin c...

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Библиографические подробности

Главные авторы:	See-Eun Cheon, Hyeon-seung Lee, Jihye Choi, Ah Reum Jeong, Taek Sung Lee, Doo Seok Jeong, Kyeong-Seok Lee, Wook-Seong Lee, Won Mok Kim, Heon Lee, Inho Kim
Формат:	Artigo
Язык:	Inglês
Опубликовано:	Nature Portfolio 2017-08-01
Серии:	Scientific Reports
Online-ссылка:	https://doi.org/10.1038/s41598-017-07463-7
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