Computer modeling of processes of semiconductor technology through information-calculating system

An information-calculating system (ICS) that allows computer simulation of processes of semiconductor technology associated with the formation of single crystals and epitaxial heterostructures based on semiconductor AIIIBV compounds was developed. The ICS database covers 9 of AIIIBV compounds and so...

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Detalles Bibliográficos

Autores principales:	V. V. Arbenina, R. Kh. Akchurin, L. B. Berliner
Formato:	Artigo
Lenguaje:	Russo
Publicado:	MIREA - Russian Technological University 2015-06-01
Colección:	Тонкие химические технологии
Materias:	iinformation-calculating system (ics), semiconductor technology, the phase equilibrium diagram, the quasi-binary section.
Acceso en línea:	https://www.finechem-mirea.ru/jour/article/view/239
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