DFM: “Design for Manufacturing” or “Design Friendly Manufacturing”
As the IC manufacturing enter sub 20nm tech nodes, DFM become more and more important to make sure more stable yield and lower cost. However, by introducing newly designed hardware (1980i etc.) process chemical (NTD) and Control Algorithm (Focus APC) into the mature tech nodes such as 14nm/12nm, mor...
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| Autors principals: | , , |
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| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
JommPublish
2020-03-01
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| Col·lecció: | Journal of Microelectronic Manufacturing |
| Matèries: | |
| Accés en línia: | http://www.jommpublish.org/p/46/ |
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