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Miniaturized double-wing ∆E-effect magnetic field sensors

Abstract Magnetoelastic micro-electromechanical systems (MEMS) are integral elements of sensors, actuators, and other devices utilizing magnetostriction for their functionality. Their sensitivity typically scales with the saturation magnetostriction and inversely with magnetic anisotropy. However, l...

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Detalles Bibliográficos
Principais autores: Fatih Ilgaz, Elizaveta Spetzler, Patrick Wiegand, Franz Faupel, Robert Rieger, Jeffrey McCord, Benjamin Spetzler
Formato: Artigo
Idioma:Inglês
Publicado: Nature Portfolio 2024-05-01
Series:Scientific Reports
Acceso en liña:https://doi.org/10.1038/s41598-024-59015-5
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