Miniaturized double-wing ∆E-effect magnetic field sensors
Abstract Magnetoelastic micro-electromechanical systems (MEMS) are integral elements of sensors, actuators, and other devices utilizing magnetostriction for their functionality. Their sensitivity typically scales with the saturation magnetostriction and inversely with magnetic anisotropy. However, l...
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| Principais autores: | , , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
Nature Portfolio
2024-05-01
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| Series: | Scientific Reports |
| Acceso en liña: | https://doi.org/10.1038/s41598-024-59015-5 |
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