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Fabrication of Dimensional and Structural Controlled Open Pore, Mesoporous Silica Topographies on a Substrate

Open pore mesoporous silica (MPS) thin films and channels were prepared on a substrate surface. The pore dimension, thickness and ordering of the MPS thin films were controlled by using different concentrations of the precursor and molecular weight of the pluronics. Spectroscopic and microscopic tec...

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Principais autores: Tandra Ghoshal, Atul Thorat, Nadezda Prochukhan, Michael A. Morris
Format: Artigo
Sprog:Inglês
Udgivet: MDPI AG 2022-06-01
Serier:Nanomaterials
Fag:
open mesopores
silica channels
block copolymers
hard mask
etching
Online adgang:https://www.mdpi.com/2079-4991/12/13/2223
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