Microfabrication Bonding Process Optimization for a 3D Multi-Layer PDMS Suspended Microfluidics

Microfluidic systems have received increased attention due to their wide variety of applications, from chemical sensing to biological detection to medical analysis. Microfluidics used to be fabricated by using etching techniques that required cleanroom and aggressive chemicals. However, another micr...

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Detalhes bibliográficos

Principais autores:	Mostapha Marzban, Ehsan Yazdanpanah Moghadam, Javad Dargahi, Muthukumaran Packirisamy
Formato:	Artigo
Idioma:	Inglês
Publicado em:	MDPI AG 2022-05-01
coleção:	Applied Sciences
Assuntos:	microfluidics soft lithography polydimethylsiloxane (PDMS) 3D suspended microfluidics suspended microchannel resonators
Acesso em linha:	https://www.mdpi.com/2076-3417/12/9/4626
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