A Comparative Study of Divergent Surface Acoustic Wave Beams’ Generation on an Y128° Lithium Niobate Using Various Types of Interdigital Transducers

This study focuses on the possibility of generating divergent surface acoustic waves (SAWs) with interdigital transducers (IDTs) deposited on Y128° Lithium Niobate for non-destructive testing applications, particularly in the context of manufacturing layer-on-substrate systems for microelectronic co...

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Autores principales:	Marc Duquennoy, Dame Fall, Nada Ben Jafela, Nikolay Smagin, Zakariae Oumekloul, Lynda Chehami, Emmanuel Moulin, Mohammadi Ouaftouh
Formato:	Artigo
Lenguaje:	Inglês
Publicado:	MDPI AG 2025-02-01
Colección:	Sensors
Materias:	interdigital transducers SAW sensor surface acoustic waves SAW divergence focused IDT laser Doppler vibrometry
Acceso en línea:	https://www.mdpi.com/1424-8220/25/4/1067
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