Energy dispersive x-ray spectroscopy for nanostructured thin film density evaluation
In this paper, we report on two fast and non-destructive methods for nanostructured film density evaluation based on a combination of energy dispersive x-ray spectroscopy for areal density measurement and scanning electron microscopy (SEM) for thickness evaluation. These techniques have been applied...
Sábháilte in:
| Príomhchruthaitheoirí: | , , , , |
|---|---|
| Formáid: | Artigo |
| Teanga: | Inglês |
| Foilsithe / Cruthaithe: |
Taylor & Francis Group
2015-04-01
|
| Sraith: | Science and Technology of Advanced Materials |
| Ábhair: | |
| Rochtain ar líne: | http://dx.doi.org/10.1088/1468-6996/16/2/025007 |
| Clibeanna: |
Níl clibeanna ann, Bí ar an gcéad duine le clib a chur leis an taifead seo!
|