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Dielectric Properties of Mg<sub>2</sub>TiO<sub>4</sub>-Doped Ca<sub>0.65</sub>Sr<sub>0.35</sub>Zr<sub>0.65</sub>Ti<sub>0.35</sub>O<sub>3</sub> with High Withstand Voltage and Low Loss

Mg<sub>2</sub>TiO<sub>4</sub>-doped Ca<sub>0.65</sub>Sr<sub>0.35</sub>Zr<sub>0.65</sub>Ti<sub>0.35</sub>O<sub>3</sub> (CSZT) thin films with different Mg<sub>2</sub>TiO<sub>4</sub> concentrations were deposited on the LaNiO<sub>3</sub>(LNO)/p-Si substrate using radio-frequency magnetron sputtering t...

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Principais autores: Yun Liu, Binbin Huang, Xiaoyang Chen, Ping Yu
Format: Artigo
Sprog:Inglês
Udgivet: MDPI AG 2022-03-01
Serier:Crystals
Fag:
linear dielectric thin films
RF magnetron sputtering
Online adgang:https://www.mdpi.com/2073-4352/12/3/405
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